Tosoh SMD launched transparent conducting oxide (TCO) sputtering targets that reportedly achieve higher solar cell efficiency than standard targets. The ITO or AZO products are doped with performance-enhancing additives that improve optical properties, in particular transparency.
March 1, 2011 — Tosoh SMD Inc., one of the group companies of Tosoh Corporation, launched transparent conducting oxide (TCO) sputtering targets that reportedly achieve higher solar cell efficiency than standard targets.
Tosoh’s new TCO targets are available in planar and rotary configurations and are composed of either traditional indium tin oxide (ITO) or aluminum zinc oxide (AZO). They are doped with performance-enhancing additives, such that thin films deposited from these targets have improved optical properties, in particular increased transparency. Conversion efficiency of solar cells increases more than one point compared with solar cells using thin films from conventional TCO targets.
TCO targets for leading-edge thin film solar applications require a stringent combination of optical, electrical, and mechanical properties and the durability to meet manufacturers’ lifetime expectations. Tosoh’s new ITO and AZO TCO targets offer films that are highly transparent, especially in the visible to infrared range, and that feature high thermal stability, including under humid conditions.
Tosoh’s AZO TCO targets enable deposition of textured surfaces for enhanced light trapping. Compared with thin films from conventional TCO targets, a single-junction thin film deposited by a Tosoh AZO TCO target in a silicon solar cell shows a one-point gain in conversion efficiency. Thin films, meanwhile, produced with Tosoh’s ITO TCO target achieve a similar gain in a copper indium gallium selenide (CIGS)-based solar cell.
Tosoh SMD, Inc., provides thin film deposition materials and of solutions to manufacturers in the semiconductor, display, solar, and large area coating markets. Tosoh Corporation is a Japanese chemical company established in 1935 and listed on the First Section of the Tokyo Stock Exchange. It is the parent of the Tosoh Group. Tosoh is one of the largest chlor-alkali manufacturers in Asia. Stock Exchange Ticker Symbol: JP: 4042. For more information, visit www.tosohsmd.com