Thin film silicon solar cell researchers order MVS cluster tools

MVSystems, Inc. received a Cluster Tool system order from Hebei University, Baoding, China, and an expansion order from the University of Toledo, Ohio for its Cluster Tool.

January 27, 2011 — MVSystems, Inc. received a Cluster Tool system order from Hebei University, Baoding, China. The system consists of many PECVD and sputtering process chambers and will be used for the development of solar cells using amorphous and nano-crystalline silicon materials.

The University of Toledo, Ohio, has also ordered an additional chamber to expand the capability of their Cluster Tool (for rigid and flexible substrates using reel to reel (R2R) cassette approach) which MVS had installed in 2009.

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A Cluster Tool system, for thin film Si solar cell development was also installed at Tian Wei Solar Films Co. Ltd., Baoding, China.

In related news, MVS is also developing a novel high efficiency thin film solar cell sponsored by National Science Foundation (NSF).

Products provided by MVSystems Inc. include cluster tools for rigid substrates (modules include PECVD, sputtering, Hot Wire CVD, rapid anneal etc. with central evacuated chamber). cluster tools for flexible substrates (using a cassette that houses a flexible material. The cassette is engaged for movement of the flexible material from one reel to another during the deposition. At the end of deposition, the cassette is locked into position and disengaged from the chamber for transport to another process chamber), and in-line PECVD systems for low volume manufacture of SiNx coatings on multicrystalline Si solar cells and high efficiency hetrojunction devices (throughput ~ 500 wafers/hr.). The company also performs foundry services for thin film Si (p,i,n), SiNx, SiOx, ZnO, and ITO depositions from the in-house Cluster Tool. Learn more at www.mvsystemsinc.com

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