R&D systems for thin-film photovoltaics

This range of systems is configured for research into thin-film photovoltaics.

This range of systems is configured for research into thin-film photovoltaics.

Affordable load-locked systems for sputtering research have 6× circular magnetron targets. Pilot-scale batch systems target full module work with 1.2m magnetrons. There is a range of configurations between these options.

Systems can be configured for glass substrates or flexible metal or polymer substrates, including sheet winding facilities. These systems can be equipped with 2, 4, 6, or 8 linear magnetrons each with different target materials to offer full process research flexibility. Larger systems can also accommodate evaporation, K-cells, radiant heating, and reactive gas control.

The rotating drum substrate carrier allows up to eight linear magnetrons to be located around the chamber walls. Software allows process flexibility controlling thin film thickness (time), gas pressure, stoichiometry, thin film microstructure, and other factors.

Co-deposition is possible from two or more magnetrons. All systems configure the magnetrons in a Closed Field arrangement resulting in high plasma density and low bias voltages.

Applied Multilayers Limited, Coalville, Leicestershire, UK; ph. +44 (0) 1530 830545; www.applied-multilayers.com.

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