Veeco uncrates optical profiler for PV cells

Veeco Instruments says its new NT9100S optical profiler system combines white light optical profilers with new features and options for rapid, 3D surface measurements of 150mm crystalline silicon wafers.

August 19, 2009 – Veeco Instruments says its new NT9100S optical profiler system combines white light optical profilers with new features and options for rapid, 3D surface measurements of 150mm crystalline silicon wafers.

Specific features for the tool include a custom 156mm programmable stage and a porous vacuum chuck for edge-to-edge measurements on 150mm PV cells. Also included are automation software, field stitching software. A patent-pending ultrauniform dual-LED illumination source provides non-contact measurements on a wide variety of super-smooth or very rough samples, from sub-nanometer surface roughness to millimeter high steps. Over 200 built-in analyses are available, as well as automated measurement sequences (recipes), data logging, and pass-fail criteria for real-time process feedback and SPC, and over 1000 critical parameters for process control and monitoring.

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Copper-indium-gallium-selenide (CIGS) boundary region with different grain structures on either side of the boundary, 640×480 array. (Source: Veeco; image courtesy A. Hall/A. Rockett, Dept. of Materials Science & Engineering, Univ. of Illinois)



 

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2.7mm stitched measurement of 60-degree slope on machined threads, 20× magnification. (Source: Veeco)



 

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