Oerlikon debuts maglev turbo molecular pump with flexible installation

The new, magnetically levitated turbo molecular pumps TURBOVAC MAGiNTEGRA of Oerlikon Leybold Vacuum can do without the space usually needed for a separate frequency converter and provide a compact, flexible design, excellent vacuum performance and a standardized program of accessories.

April 12, 2011 — The new, magnetically levitated turbo molecular pumps TURBOVAC MAGiNTEGRA of Oerlikon Leybold Vacuum can do without the space usually needed for a separate frequency converter and provide a compact, flexible design, excellent vacuum performance and a standardized program of accessories.

Click to EnlargeThe pumps offer maintenance-free operations in most industrial processes, such as display, solar, and coating fab, and R&D applications. The MAGiNTEGRA pumps are resistant against process particles and deposits. Process-induced shock venting is tolerated to a high degree.

A key feature of the pump is assembly in any position and angle. The rotationally symmetrical and space-saving housing is combined with a frequency converter that can be mounted flexibly as well.

Due to the 5-axis magnetically levitated (maglev) bearings, the TURBOVAC MAGiNTEGRA requires hardly any maintenance and shows a high degree of safety against hydrocarbons, especially when even low contamination of remaining bearing lubricants or greases are not compatible with sensitive manufacturing processes. The MAGiNTEGRA pumps operate at extremely low vibration levels.

Modern state-of the art communication interfaces and intelligent pump parameter monitoring include self-protection functions in case of operational disturbances. The MAGiNTEGRA complements the high fore vacuum expertise of the established DRYVAC standardized pump systems used in photovoltaic (PV) manufacturing processes.

Oerlikon Leybold Vacuum offers a wide range of advanced vacuum solutions for use in manufacturing and analytical processes, as well as for research purposes. Learn more at http://www.oerlikon.com/leyboldvacuum/ecomaXL/oe_VACUUM_EN_home

Subscribe to Photovoltaics World

Follow Photovoltaics World on Twitter.com via editors Pete Singer, twitter.com/PetesTweetsPW and Debra Vogler, twitter.com/dvogler_PV_semi.

Or join our Facebook group

No posts to display