“Rudolph’s Discover Solar Software provides all the process information to our solar cell production lines. It will allow our customers to bring new lines up to profitable yields and volumes even faster than they can now,” said Dr. Avishai Kepten, Vice President of Solar Cell Lines of Spire Corporation. “Customers will be able to achieve higher average cell efficiencies and reduce manufacturing costs. Discover Solar software will give our customers a competitive edge.”

“We are delighted to have this opportunity to work with Spire,” said Mike Plisinski, Vice President and General Manager of Rudolph’s Data Analysis business. “Discover Solar Software is the first yield management tool specifically designed to help PV manufacturers to maximize the efficiency of their cell devices, as well as optimize their production processes.”

About Rudolph Technologies, Inc.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on Rudolph’s website at www.rudolphtech.com.

About Spire Corporation

Spire Corporation is a global solar company providing turnkey production lines and capital equipment to manufacture photovoltaic modules worldwide. Spire Semiconductor provides processing technology for Spire’s silicon solar cell manufacturing lines and produces and sells custom gallium arsenide cells for solar concentrator systems. For corporate or product information, contact Spire Corporation, “The Turnkey Solar Factory Company,” at 781 275 6000, or visit www.spirecorp.com.

Contacts

Spire Corporation

Dr. Avishai Kepten

781-275-6000

pvsales@spirecorp.com

Rudolph Technologies, Inc.

Steven R. Roth

973-448-4302

steven.roth@rudolphtech.com

Rudolph Technologies, Inc.

Virginia Becker

952-259-1647

virginia.becker@rudolphtech.com

Certain matters described in this news release may be forward-looking statements subject to risks and uncertainties that could cause actual results to differ materially from those indicated in the forward-looking statements. Such risks and uncertainties include, but are not limited to, the risk of dependence on market growth, competition and dependence on government agencies and other third parties for funding contract research and services, as well as other factors described in the Company's Form 10 K and other periodic reports filed with the Securities and Exchange Commission.

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