Generation 5 for Taiwan
By
Torsten Winkler, Director of Marketing & Sales, Solar Division
|
October 7, 2010
Commissioning of linear cluster system paves way for further
7th of September 2010, Alzenau, Germany Leybold Optics is currently bringing a Phoebus linear cluster system into commission at NexPower in Taiwan city of Taichung. Having been delivered as individual components, the system for the manufacture of thin film photovoltaic modules is now being assembled locally. As Torsten Winkler, Director of Marketing & Sales for the Solar Division explains: "This PECVD system represents an upgrade to the existing NexPower silicon thin film production facility. It is our common goal to extend our cooperation to future silicon thin film production facilities."
The Phoebus PECVD system: guaranteed efficiency and process stability Based on a vertical, carrier-free approach, the Phoebus linear cluster system facilitates the cost-effective deposition of light absorbers composed of amorphous or microcrystalline silicon by means of plasmaenhanced chemical vapour deposition (PECVD). The system uses a vacuum production platform specially designed by Leybold Optics. As Torsten Winkler puts it, “Phoebus is characterized by high process stability, with the utmost in productivity also guaranteed thanks to maximized throughput rates.” Low floor space requirements and minimal operating costs as a result of its maintenance-friendly setup are further reasons to choose the Phoebus system. Delivered in the second quarter, the system processes Generation 5 substrates with dimensions of 1100 x 1400 mm. Leybold Optics – A blend of tailored solutions and tradition
Based on a vertical, carrier-free approach, the Phoebus linear cluster system facilitates the cost-effective deposition of light absorbers composed of amorphous or microcrystalline silicon by means of plasmaenhanced chemical vapour deposition (PECVD). The system uses a vacuum production platform specially designed by Leybold Optics. As Torsten Winkler puts it, “Phoebus is characterized by high process stability, with the utmost in productivity also guaranteed thanks to maximized throughput rates.” Low floor space requirements and minimal operating costs as a result of its maintenance-friendly setup are further reasons to choose the Phoebus system. Delivered in the second quarter, the system processes Generation 5 substrates with dimensions of 1100 x 1400 mm.
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